Axcelis Technologies, Inc.https://pcaobus.org/form-ap-filings/37143/37143Axcelis Technologies, Inc.371433/28/2019 8:05:35 AM20186302d074-653d-423b-9e30-1cf7bd25c1e442Ernst & Young LLP133101Axcelis Technologies, Inc.1113232ACLS0004200171James Thomas Belliveau00042001711251#^#1408Ernst & Young GmbH Wirtschaftspruefungsgesellschaft#^#Ernst & Young Hua Ming LLPTrue
Axcelis Technologies, Inc.https://pcaobus.org/form-ap-filings/21106/21106Axcelis Technologies, Inc.211063/30/2018 1:49:34 PM2017cbe5ca21-8b38-4dc3-95c3-fb1c32a636bd42Ernst & Young LLP133101Axcelis Technologies, Inc.1113232ACLS0004200171James Thomas Belliveau00042001711408Ernst & Young Hua Ming LLPTrue
Axcelis Technologies, Inc.https://pcaobus.org/form-ap-filings/3948/3948Axcelis Technologies, Inc.39483/24/2017 4:22:14 PM2016c67d31d9-4f78-40ef-9cab-ccc383a2cf3842Ernst & Young LLP133101Axcelis Technologies, Inc.1113232ACLS0004200171James Thomas Belliveau0004200171True